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<p class="MsoNormal"><span style="font-size: 14.0pt; font-family: 楷体;" lang="EN-US">1</span><span style="font-size: 14.0pt; font-family: 楷体;">、退火室、进样室；</span></p>
<p class="MsoNormal"><span style="font-size: 14.0pt; font-family: 楷体;" lang="EN-US">2</span><span style="font-size: 14.0pt; font-family: 楷体;">、退火室极限真空度：优于<span lang="EN-US">9&times;10<sup>-8</sup>Pa</span>；</span></p>
<p class="MsoNormal"><span style="font-size: 14.0pt; font-family: 楷体;" lang="EN-US">3</span><span style="font-size: 14.0pt; font-family: 楷体;">、退火室在加热至<span lang="EN-US">1600℃</span>时的热态真空度优于<span lang="EN-US">6.6&times;10<sup>-5</sup>Pa</span>；</span></p>
<p class="MsoNormal"><span style="font-size: 14.0pt; font-family: 楷体;" lang="EN-US">4</span><span style="font-size: 14.0pt; font-family: 楷体;">、进样室极限真空度：优于<span lang="EN-US">6.6&times;10<sup>-4</sup>Pa</span>；</span></p>
<p class="MsoNormal"><span style="font-size: 14.0pt; font-family: 楷体;" lang="EN-US">5</span><span style="font-size: 14.0pt; font-family: 楷体;">、样品库：样品库<span lang="EN-US">4</span>个工位，每个工位可放置直径<span lang="EN-US">4</span>英寸；</span></p>
<p class="MsoNormal"><span style="font-size: 14.0pt; font-family: 楷体;" lang="EN-US">6</span><span style="font-size: 14.0pt; font-family: 楷体;">、温度：加热炉温最高<span lang="EN-US">1600℃</span>。</span></p></ul>
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<p class="MsoNormal" style="line-height: 16.5pt;"><span style="font-size: 14pt; font-family: 楷体;">账号：<span lang="EN-US">2100 1394 6010 5958 1266</span></span></p>
<p class="MsoNormal" style="line-height: 16.5pt;"><span style="font-size: 14pt; font-family: 楷体;">纳税号：<span lang="EN-US">912101 0041 0581 2660</span></span></p>
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