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<p><span style="font-size: medium; font-family: 黑体;">&nbsp; &nbsp; 本设备采用等离子体增强化学气相沉积技术雷火体育 | 登入，在光学玻璃、硅、石英以及不锈钢等不同衬底材料上沉积氮化硅、非晶硅和微晶硅等薄膜，用以制备非晶硅和微晶硅薄膜太阳电池器件雷火体育 | 登入?雷火体育 | 登入？晒惴河τ糜诖笞ㄔ盒?、科研院所的薄膜材料的科研与小批量制备雷火体育 | 登入雷火体育 | 登入。</span></p>
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